Vibration-Free Despite Extreme Acceleration
Use of the PowerStop Industrial Shock Absorber Series in a Dynamic Wafer Stage.
In high-precision processes, such as laser fuse cutting and other modern semiconductor manufacturing processes, positioning systems that meet extreme requirements for speed, acceleration, and repeatability are indispensable. The EZ-GS0760 Dynamic Wafer Stage from Eitzenberger is a multi-axis system developed for such applications.
To ensure the safety of highly dynamic movements and to provide controlled energy dissipation at end positions, Eitzenberger integrates PowerStop series industrial shock absorbers from the Zimmer Group into the stage’s overall design. The dampers absorb residual kinetic energy in a controlled manner at defined end positions and help prevent mechanical stress spikes from affecting the system—even during movements with accelerations of up to 8 g.
The EZ-GS0760 Dynamic Wafer Stage
The EZ-GS0760 Dynamic Wafer Stage is a highly dynamic X/Y positioning system with a Z-focus axis, designed for fast and high-precision applications. The system is characterized by nanometer-level positioning accuracy and repeatability, enables rapid changes in direction, and utilizes integrated differential laser interferometers from SIOS that compensate for Abbe errors in real time. Despite this advanced measurement technology, abrupt stops or changes in direction generate kinetic energy that must be dissipated in a mechanically controlled manner to avoid compromising the stage’s precision.
PowerStop Series Industrial Shock Absorbers
From 100 to 0 with a shock absorber. Industrial shock absorbers such as those in the PowerStop series are specifically designed to absorb kinetic energy from moving masses in a controlled manner and convert it into heat. Unlike rigid stops, they enable low-vibration deceleration of the masses, prevent recoil, and reduce mechanical stress on axes, guides, and sensors. In the Dynamic Wafer Stage, they perform defined protective and safety functions within the overall system and ensure that no harmful stress peaks are transmitted into the structure, even under extreme accelerations. In this way, they contribute directly to process stability and the service life of the system.
Continuous Damping Thanks to Helical Groove Technology
With the PowerStop, the Zimmer Group has developed a hydraulic industrial shock absorber that decelerates kinetic energy down to zero. Through optimal utilization, the PowerStop achieves maximum energy absorption within the smallest possible installation space. The unique helical groove technology ensures low-vibration braking performance without compromising precision. The hydrostatic piston guide ensures a long service life and consistent damping characteristics over millions of cycles. A stainless steel housing and corrosion-resistant materials ensure long-term operation in demanding industrial environments. Different variants of the series allow for adaptation to the specific energy and space requirements of various axes within the Dynamic Wafer Stage.
Significance for the Dynamic Wafer Stage
The PowerStop shock absorbers fulfill several functions in the EZ-GS0760. First, they safely dissipate the kinetic energy of highly dynamic movements, thereby preventing harsh mechanical shocks. Second, the precise damping reduces vibrations that could negatively affect positioning accuracy. This is particularly relevant for applications requiring nanometer-level precision, such as laser fuse cutting or high-precision wafer scanning. Furthermore, the damping protects the mechanical components and sensors, thereby extending maintenance intervals and increasing system availability.
Conclusion
Industrial shock absorbers from the PowerStop series are an integral part of the protection and safety concept for multi-axis systems such as the Dynamic Wafer Stage from Eitzenberger. They ensure that highly dynamic movements are decelerated in a controlled manner, minimize vibrations, and reduce stress on the mechanical components. In this way, they make a decisive contribution to the system’s precision, reliability, and service life. In combination with the stage’s advanced measurement technology and dynamic design, the shock absorbers enable even the most demanding manufacturing processes to be carried out efficiently and with reproducible results.
